Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nanoscale into "Nanoelectromechanical Systems" (NEMS) and Nanotechnology. In Europe, MEMS are often referred to as Micro Systems Technology (MST). It should not be confused with the hypothetical vision of Molecular nanotechnology or Molecular Electronics. ==of a metre) to a millimetre (thousandth of a metre). At these size scales, a human's intuitive sense of physics do not always hold true. Due to MEMS' large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass. They are fabricated using modified silicon fabrication technology (used to make electronics), molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing very small devices. MEMS sometimes go by the names micromechanics, micro machines, or micro system technology (MST).
Companies with strong MEMS programs come in many sizes. The larger firms specialize in manufacturing high volume inexpensive components or packaged solutions for end markets such as automobiles, biomedical, and electronics. The successful small firms provide value in innovative solutions and absorb the expense of custom fabrication with high sales margins. In addition, both large and small companies work in R&D to explore MEMS technology. Complexity and performance of advanced MEMS based sensors are described by different MEMS sensor generations.
Common applications include:
Processors :: Components
Nanotechnology :: Technology

Microengineering Research Group - Research group focussed on microfluidics, including micropumps and microvalves. Includes details on research areas and contact information.
2003 NanoTechnology Conference and Trade Show - Conference / trade show on nanoscience, technology and business. San Francisco, CA, USA.
Meta Description: [ Nanotech 2003 - NSTI Nanotechnology Conference and Trade Show. An interdisciplinary forum on nanotechnology, biotechnology and microtechnology. ]
Advanced Micro and Nanosystems Lab - University of Toronto group that focuses on bio-oriented micro and nanosystems. Research areas include MEMS and NEMS sensors and actuators, biosensors, microrobotic biomanipulation, microstructure controls, and biomechanics.
Meta Description: [ AMNL focuses on micromanipulation, MEMS, NEMS, biomanipulation and micromechatronic systems. ]
Applied Computational Research Society - Nonprofit organization dedicated to cultivating interdisciplinary approaches to computational simulations. Emphasis on nanotechnology, nanoscience, and microsystems.
Meta Description: [ Nanotechnology services, events, publications, courses and news. Home of the Nanotech conference and trade show ]
Berkeley Sensor and Actuator Center (BSAC) - An NSF Center for the development of microsensors, microactuators, and MEMS.
Caltech Micromachining Laboratory - University fabrication laboratory and research group. Areas of research include: sensors and actuators, fabrication, microstructures. Open to industrial users.
Meta Description: [ The Caltech Micromachining Lab is headed by Prof. Yu-Chong Tai. Research in the lab includes MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. The lab is a complete micromachining facility including a clean-room processing lab, a computer lab, and a me... ]
Center for Applied Microtechnology - Provides education for, research, and promotion of microtechnology.
Meta Description: [ CAM provides education for, and supports cutting edge microtechnology based research, promoting microtechnology, and the microtechnology industry in Washington state. ]
Center for Wireless Integrated MicroSystems - Research center concentrating on micropower circuits, wireless interfaces, biomedical and environmental sensors and subsystems, and advanced packaging. Includes facility and research information, and staff directory.
Meta Description: [ WIMS (Wireless Integrated Microsystems), a University of Michigan NSF ERC,is currently leading research in the fast paced field of WIMS/MEMS (Micro-Electro-Mechanical Systems). ]
Cornell Nanofabrication Facility - Provides facilities and services for fabrication of microstructures and nanostructures. Open to both academic and industrial researchers.
Meta Description: [ nanotechnology, nano news, cornell nanoscale facility, cornell nanofabrication facility, clean room, nanotech, nanofabrication, REU ]
CU MEMSweb - Research center at the University of Colorado. Topics include: RF devices, optoelectronics, and reliability.
Meta Description: [ MEMS research in RF,
optoelectronics (MOEMS), materials/reliability,
high-temperature devices, packaging, and self-assembly. ]
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DARPA MEMS Program - A program to merge sensing, actuating, and computing for applications in weapons systems and battlefield environments.
Institute for Micromanufacturing - Research and development facility at Louisiana Tech University with an emphasis on applied technology and commercial applications.
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Intelligent Microsystem Program - Korean government research program developing microsystem medical implant and micro-PDA. Korean and English.
KJIST MEMS Nanomachine Lab - Research group at the Kwangju Institute of Science and Technology. Topics include optical devices and nanomechanics.
Lab-on-a-Chip - Information, news, events, jobs, publications and companies involved in microarrays and microfluidics.
Meta Description: [ News, posters, events and suppliers from the main portal site for the fields of Microarrays and Microfluidics. ]
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MEMS 2002 - International conference on MEMS in Las Vegas, Nevada.
MEMS and Microtechnology - General information about MEMS construction.
Meta Description: [ This section features MicroElectroMechanical Systems - MEMS. It describes MEMS applications, microactuators based on electrostatics and thermal actuators, MEMS fabrication etc. ]
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MEMS at Tennessee Tech - MEMS coursework and research at Tennessee Tech. Univ.
MEMS Clearinghouse - Contains industry news, plus job and event listings. Also, hosts several mailing lists.
Meta Description: [ Information about MEMS and the MEMS community, including announcements, upcoming events, job postings, and the mems-talk mailing list. ]
MEMS Exchange - A distributed fabrication environment providing access to various manufacturing technologies.
MEMS Executive Congress - Annual one-day conference for business leaders in and around the MEMS industry.
Meta Description: [ MEMS Industry Group ]
MEMS Industry Group - Industry association for the MEMS and microstructures industries
Meta Description: [ MEMS Industry Group ]
MicroMachines Centre - Nanyang Technological University research center with microfabrication facilities with projects in optical MEMS, RF MEMS, and microfluidics. Includes research and staff descriptions, and facility information.
Meta Description: [ Website of the MicroMachines Centre in the School of MAE, Nanyang Technological University, Singapore. The Centre is nurturing advanced research and development initiative in MEMS in Singapore. ]
MiRCTECH - Microwave circuit research using technologies such as micromachining, MEMS devices and electromagnetic-bandgap (EBG) structures.
Meta Description: [ The Microwave Circuit Technology Group was established in 2001 by Dr. John Papapolymerou and focuses on research in the area of microwave engineering. More specifically, students study and develop novel microwave structures using techniques such as micromachining, MEMS devices, and EBG structures. ]
MSM 2003 - Sixth International Conference on Modeling and Simulation of Microsystems. Covers simulations of MEMS and other microsystems. San Francisco, CA, USA.
Meta Description: [ 6th International Conference on Modeling and Simulation of Microsystems, MSM 2003 ]
MSM 2004 - Seventh International Conference on Modeling and Simulation of Microsystems. Boston, MA, USA.
Meta Description: [ MSM 2004 Conference on Modeling and Simulation of Microsystems ]
MSM 2005 - Eighth International Conference on Modeling and Simulation of Microsystems. Anaheim, California.
Meta Description: [ An Interdisciplinary Integrative Forum on Modeling, Simulation and Scientific Computing in the MEMS, Microelectronic, Semiconductor, Sensors, Materials and Biotechnology fields. ]
Nexus - European Microsystems Network -- Nonprofit association aimed at the microsystems professional. Includes a who's who list, job opportunities, conferences, and user/supplier clubs.
NIST MEMS Project - USA government laboratory for measurements and standards. Run with the goal of stimulating economic growth.
Meta Description: [ NIST MicroElectroMechanical Systems MEMS Project Home Page ]
Optical microsystems group - University of Minnisota - Research group of Dr. Joseph Talghader. Includes information on group members, and details of various research projects
Meta Description: [ This is the site of Joey Talghader's research group at the University of Minnesota. Our research largely concerns optomechanical microsystems (optical MEMS). More specifically we are researching adaptive infrared detectors, microfluidic sensors, mechanical designs of optics, and high power optics. ]
Samlab - Research and development at the University of Neuchâtel, Switzerland.
Meta Description: [ Home page of the Sensors, Actuators and Microsystems Laboratory, Institute of Microtechnology, Neuchâtel, Switzerland ]
Sandia MEMS - Government research lab with a very large MEMS development effort. Includes tutorial, bibliography, image and movie galleries, and live MEMScam.
Meta Description: [ Microelectromechanical Systems (MEMS) at Sandia, fabrication, shortcourses, MEMS reliability testing and characterization, microoptics, RF MEMS, microfluidics ]
Small Times - News about MEMS, Nanotechnology and Microsystems
Meta Description: [ Daily articles covering MEMS, nanotechnology, and microsystems, with a business angle.
Recent Nanotechnology News, products and stocks. Nanotechnology newsletters and events available. ]
Tex-MEMS VI - MEMS and Beyond: Nanotechnology Includes history, registration and travel information, and an online abstract submission form.
trimmer.net - A general resource and information page, including a collection of information and links. Contains conference information, a journal club, and tutorials on the basics of fabrication.
Meta Description: [ None ]
Umech Technologies - Provides advanced MEMS metrology instruments for measuring 3D, real-time motion and dynamic profiles of complex microstructures (MEMS motion analysis).
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